• DocumentCode
    670444
  • Title

    A current assisted deposition method based on contact mode atomic force microscope

  • Author

    Zeng-Lei Liu ; Nian-Dong Jiao ; Lian-Qing Liu ; Zhi-Dong Wang

  • Author_Institution
    State Key Lab. of Robot., Shenyang Inst. of Autom., Shenyang, China
  • fYear
    2013
  • fDate
    26-29 May 2013
  • Firstpage
    287
  • Lastpage
    290
  • Abstract
    This paper introduces a novel AFM deposition method. In contrast to traditional method, the method in this paper has two differences. Firstly in our method AFM works in contact mode. AFM tip presses on substrate slightly in contact mode and it does not need to control AFM tip-substrate separation precisely, which makes AFM deposition easy to carry out. Secondly current is applied to AFM tip to induce deposition instead of voltage. By applying current, uniform nanodots can be fabricated repeatedly. Furthermore, nanolines can be fabricated directly in a single action with the method. The method is potential to be used for soldering nanowires or fabricating nanostructures.
  • Keywords
    atomic force microscopy; nanofabrication; nanowires; AFM; assisted deposition method; contact mode atomic force microscopy; nanostructures; nanowires; soldering; tip-substrate separation; Atomic force microscopy; Electric fields; Force; Gold; Presses; Substrates; AFM; deposition; field emission; nano fabrication;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Cyber Technology in Automation, Control and Intelligent Systems (CYBER), 2013 IEEE 3rd Annual International Conference on
  • Conference_Location
    Nanjing
  • Print_ISBN
    978-1-4799-0610-9
  • Type

    conf

  • DOI
    10.1109/CYBER.2013.6705460
  • Filename
    6705460