DocumentCode
670444
Title
A current assisted deposition method based on contact mode atomic force microscope
Author
Zeng-Lei Liu ; Nian-Dong Jiao ; Lian-Qing Liu ; Zhi-Dong Wang
Author_Institution
State Key Lab. of Robot., Shenyang Inst. of Autom., Shenyang, China
fYear
2013
fDate
26-29 May 2013
Firstpage
287
Lastpage
290
Abstract
This paper introduces a novel AFM deposition method. In contrast to traditional method, the method in this paper has two differences. Firstly in our method AFM works in contact mode. AFM tip presses on substrate slightly in contact mode and it does not need to control AFM tip-substrate separation precisely, which makes AFM deposition easy to carry out. Secondly current is applied to AFM tip to induce deposition instead of voltage. By applying current, uniform nanodots can be fabricated repeatedly. Furthermore, nanolines can be fabricated directly in a single action with the method. The method is potential to be used for soldering nanowires or fabricating nanostructures.
Keywords
atomic force microscopy; nanofabrication; nanowires; AFM; assisted deposition method; contact mode atomic force microscopy; nanostructures; nanowires; soldering; tip-substrate separation; Atomic force microscopy; Electric fields; Force; Gold; Presses; Substrates; AFM; deposition; field emission; nano fabrication;
fLanguage
English
Publisher
ieee
Conference_Titel
Cyber Technology in Automation, Control and Intelligent Systems (CYBER), 2013 IEEE 3rd Annual International Conference on
Conference_Location
Nanjing
Print_ISBN
978-1-4799-0610-9
Type
conf
DOI
10.1109/CYBER.2013.6705460
Filename
6705460
Link To Document