Finite element analysis on magnetic force generation of electromagnetic microactuator for micropump

In this work, a theoretical analysis on the magnetic force generation of micro-actuator driven by planar microcoil is reported. The actuator design is optimized to increase the magnetic force and flux density that is useful for mechanical membrane deformation of an actuator. Therefore, this work is focused on the design and simulation of actuator material and structure using a finite element analysis method. As the results, the obtained magnetic force of maximum 11.4 mN has been observed for the actuator design having coil geometry of width w = 100 μm, space s =100 μm, turn N = 20 and thickness t =20 μm with NdFeB as magnet material. Hence, the optimized design geometry of the coil can be used as reference for the fabrication of electromagnetic actuator for micropump application.