Analytical modeling and simulation of a CMOS-MEMS cantilever based CO2 sensor for medical applications

Author

Mirza, Abdulrahman ; Hamid, Nor Hisham ; Khir, M. H. Md ; Dennis, J.O. ; Ashraf, Khalid ; Jan, M. Tariq ; Shoaib, Mohammed

Author_Institution

Dept. of Electr. & Electron. Eng., Univ. Technologi PETRONAS, Tronoh, Malaysia

fYear

2013

fDate

25-27 Sept. 2013

Firstpage

70

Lastpage

73

Abstract

Capnometers measure the concentration of CO₂ in exhaled breath which could prevent serious problems in all areas of healthcare, from pre-hospital to extended care, and everywhere in between. Presently, high cost, big size and high power usage limit the scope of the conventional capnometers and their adaption. To overcome these issues, a CMOS MEMS micro-cantilever has been proposed for capnometric applications. Analytical modeling and simulation of the microcantilever sensor is carried out to determine its resonance frequency and sensitivity. According to the developed analytical model and simulation results, the sensor has 1% difference in the resonance frequency. The sensitivity of the sensor is determined analytically at different thicknesses of the polymer coating layer. The sensitivity of the sensor is 3.18 Hz/100ppm at 5 μm polymer layer thickness.

Keywords

CMOS integrated circuits; cantilevers; carbon compounds; gas sensors; microsensors; polymers; CMOS MEMS cantilever; CO₂; CO₂ sensor; analytical modeling; capnometric applications; medical applications; microcantilever sensor; polymer coating layer; resonance frequency; sensitivity; size 5 mum; Analytical models; Frequency measurement; Mathematical model; Monitoring; Polymers; Resonant frequency; Sensitivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro and Nanoelectronics (RSM), 2013 IEEE Regional Symposium on

Conference_Location

Langkawi

Print_ISBN

978-1-4799-1181-3

Type

conf

DOI

10.1109/RSM.2013.6706475

Filename

6706475