DocumentCode :
671184
Title :
Effect of annealing temperature on electrical and optical properties of ZnO thin films prepared by sol gel method
Author :
Hannas, M. ; Manut, Azrif ; Rahman, Nurul Huda Abdul ; Rosli, Aimi Bazilah ; Rusop, M.
Author_Institution :
NANO-Electron. Centre (NET), Univ. Teknol. MARA (UiTM) Shah Alam Selangor, Shah Alam, Malaysia
fYear :
2013
fDate :
25-27 Sept. 2013
Firstpage :
227
Lastpage :
230
Abstract :
In this work, ZnO thin films were deposited on glass substrates using spin coating method. Different annealing temperature from 400 to 550°C significantly distresses the nature of electrical and optical properties of ZnO thin films have been investigated. The effect of annealing temperature on optical and electrical properties of nanostuctured ZnO thin films deposited by spin coating method has been studied. The optical properties were characterized by ultraviolet visible (UV-VIS-NIR) spectrophotometer. The electrical properties were analyzed using I-V measurement (CEP 2000). Gold (Au) was used as a metal contact using electron beam thermal evaporator (ULVAC). The optical transmittance spectrums showed the average transmittance of ZnO thin film with different annealing temperature higher than 90% in visible wavelength region. The optical band properties of the nanostructured ZnO thin films were analyzed by UV Vis and Tauc method was accepted to estimate the optical gap and absorption coefficient. The resistivity of the film decreased as the annealing temperature increased from 400 to 550oC. The highest conductivity values of ZnO thin film was obtained at 500°C with value 0.000197 Scm-1. Moreover, the higher porosity was found at 400oC with value 57.5%. The higher porosity of ZnO thin film can be expected the high sensitivity for gas sensor due to the material has a comparatively large surface area.
Keywords :
II-VI semiconductors; absorption coefficients; annealing; electrical resistivity; energy gap; infrared spectra; nanofabrication; nanostructured materials; porosity; semiconductor growth; semiconductor thin films; sol-gel processing; spin coating; ultraviolet spectra; visible spectra; wide band gap semiconductors; zinc compounds; I-V measurement; SiO2; Tauc method; UV Vis method; ZnO; ZnO thin film porosity; absorption coefficient; annealing temperature effect; average transmittance; electrical property nature; electron beam thermal evaporator; film resistivity; gas sensor; glass substrates; metal contact; nanostuctured ZnO thin films; optical band properties; optical gap; optical property nature; optical transmittance spectrums; sol gel method; spin coating method; surface area; temperature 400 degC to 550 degC; ultraviolet visible spectrophotometer; visible wavelength region; Annealing; Optical films; Optical sensors; Photonic band gap; Zinc oxide; Gas sensor; High sensitivity; Porosity; Sol-Gel Spin Coating; ZnO thin film;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro and Nanoelectronics (RSM), 2013 IEEE Regional Symposium on
Conference_Location :
Langkawi
Print_ISBN :
978-1-4799-1181-3
Type :
conf
DOI :
10.1109/RSM.2013.6706515
Filename :
6706515
Link To Document :
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