Main factor interaction relationship of lattice parameter in Ba0.65Sr0.35TiO3 thin films processing

This paper presents the interaction relationships between spin coating speed, heat treatment time, and annealing temperature in response to the lattice parameter in ferroelectric Barium Strontium Titanate (BST). The investigation was done using a full factorial design of experiment (DOE). Analysis was done quantitatively by plotting the main effects graphs. The results suggest that the lattice parameter being larger at low level of spin coating speed. Annelaing temperature and heat treatment time have strong interaction between each factors because both graphs intersect while the combination. Interactions between annealing temperature and spin coating speed as well as heat treatment time and spin coating speed also indicate that interation are present due to the non parallel graphs obtained.