DocumentCode :
671189
Title :
Ba0.7 Sr0.3 TiO3 thin film dielectric properties with different deposition layer
Author :
Chin, T.Y. ; Sauli, Zaliman ; Retnasamy, Vithyacharan ; Ramli, Nordin
Author_Institution :
Sch. of Microelectron. Eng., Univ. Malaysia Perlis (UniMAP), Arau, Malaysia
fYear :
2013
fDate :
25-27 Sept. 2013
Firstpage :
245
Lastpage :
247
Abstract :
Barium strontium titanate(BaxSr1-xTiO3), BST thin film was a ferroelectric material used commercially in worldwide since decades ago. Many researches were done on this BST thin film. In this work, the experiment is focus on the dielectric properties of Ba0.7Sr0.3TiO3 thin film with different deposition layer. As the deposition layer of Ba0.7Sr0.3TiO3 increase, the dielectric properties of the thin film increase.
Keywords :
barium compounds; dielectric losses; ferroelectric thin films; ferroelectricity; inhomogeneous media; liquid phase deposition; permittivity; strontium compounds; Ba0.7Sr0.3TiO3; barium strontium titanate; deposition layer; dielectric constant; dielectric loss; ferroelectric material; thin film dielectric properties; Barium; Dielectric constant; Dielectric losses; Films; Strontium; Substrates; BST; Thin Flim;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro and Nanoelectronics (RSM), 2013 IEEE Regional Symposium on
Conference_Location :
Langkawi
Print_ISBN :
978-1-4799-1181-3
Type :
conf
DOI :
10.1109/RSM.2013.6706520
Filename :
6706520
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=671189
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