• DocumentCode
    671189
  • Title

    Ba0.7 Sr0.3 TiO3 thin film dielectric properties with different deposition layer

  • Author

    Chin, T.Y. ; Sauli, Zaliman ; Retnasamy, Vithyacharan ; Ramli, Nordin

  • Author_Institution
    Sch. of Microelectron. Eng., Univ. Malaysia Perlis (UniMAP), Arau, Malaysia
  • fYear
    2013
  • fDate
    25-27 Sept. 2013
  • Firstpage
    245
  • Lastpage
    247
  • Abstract
    Barium strontium titanate(BaxSr1-xTiO3), BST thin film was a ferroelectric material used commercially in worldwide since decades ago. Many researches were done on this BST thin film. In this work, the experiment is focus on the dielectric properties of Ba0.7Sr0.3TiO3 thin film with different deposition layer. As the deposition layer of Ba0.7Sr0.3TiO3 increase, the dielectric properties of the thin film increase.
  • Keywords
    barium compounds; dielectric losses; ferroelectric thin films; ferroelectricity; inhomogeneous media; liquid phase deposition; permittivity; strontium compounds; Ba0.7Sr0.3TiO3; barium strontium titanate; deposition layer; dielectric constant; dielectric loss; ferroelectric material; thin film dielectric properties; Barium; Dielectric constant; Dielectric losses; Films; Strontium; Substrates; BST; Thin Flim;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro and Nanoelectronics (RSM), 2013 IEEE Regional Symposium on
  • Conference_Location
    Langkawi
  • Print_ISBN
    978-1-4799-1181-3
  • Type

    conf

  • DOI
    10.1109/RSM.2013.6706520
  • Filename
    6706520
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=671189