Humidity sensor based on SnO2 nanoparticle thin film synthesized by thermal chemical vapor deposition (CVD)

SnO₂ nanoparticle thin film has been synthesized by using thermal chemical vapor deposition (CVD). The SnO₂ nanoparticle were growth on Au catalyst at different substrate temperature (400~550^oC). The surface morphology of were characterized using field emission scanning electron microscopy (FESEM). The sensing properties of SnO₂ nanoparticle thin film were examined using two point probe current-voltage (I-V) measurement (Keithley 2400). Heavily distribution of SnO₂ nanoparticle thin film at 450°C that reveal from the FESEM image. The higher sensitivity of SnO2 nanoparticle thin film was performed good at 450°C compare to others samples with 45 ratio. The response and recovery of SnO₂ nanoparticle thin film were 485 s and 24s respectively.