Title :
Improvement in dielectric properties of bilayer ZnO/MgO films deposited by Sol-Gel technique
Author :
Habibah, Z. ; Wahid, M.H. ; Ismail, L.N. ; Bakar, Rohani Abu ; Rozana, M.D. ; Rusop, M.
Author_Institution :
NANO-Electron. Centre (NET), Univ. Teknol. MARA, Shah Alam, Malaysia
Abstract :
Magnesium oxide and bilayer ZnO/MgO dielectrics film were successfully deposited using spin coating technique. The effect of MgO layer thickness towards prepared dielectric films behaviour was determined by controlling the deposition time. The comparison of the MgO and ZnO/MgO dielectrics film properties shows that the bilayer ZnO/MgO with 238nm MgO layer thickness shows better dielectrics properties compared to others. This was due to its small surface roughness which resulted in better electrical properties that have high resistivity and low leakage current. Optimized bilayer ZnO/MgO film was then used as the dielectrics film for fabrication of organic capacitor. Capacitor performance was determined via capacitance-voltage (C-V) analysis at different frequency applied and it revealed that, the capacitance value increased from 2.4pF to 10pF with addition of PVDF-TrFE organic ferroelectric layer on bilayer ZnO/MgO film caused by high polarization produced in the film.
Keywords :
II-VI semiconductors; capacitance; dielectric polarisation; dielectric thin films; electrical resistivity; ferroelectric capacitors; leakage currents; magnesium compounds; polymers; sol-gel processing; spin coating; surface roughness; wide band gap semiconductors; zinc compounds; MgO layer thickness effect; PVDF-TrFE organic ferroelectric layer addition; ZnO-MgO; ZnO-MgO dielectric film properties; bilayer ZnO-MgO dielectric film; capacitance-voltage analysis; capacitor performance; deposition time; dielectric film behaviour; electrical properties; leakage current; magnesium oxide dielectric film; optimized bilayer ZnO-MgO film; organic capacitor fabrication; resistivity; size 238 nm; sol-gel technique; spin coating technique; surface roughness; Capacitors; Conductivity; Dielectric films; Leakage currents; Zinc oxide; BilayerZnO/MgO; Dielectric Properties; Organic Capacitor; PVDF-TrFE; Sol-gel;
Conference_Titel :
Micro and Nanoelectronics (RSM), 2013 IEEE Regional Symposium on
Conference_Location :
Langkawi
Print_ISBN :
978-1-4799-1181-3
DOI :
10.1109/RSM.2013.6706531