• DocumentCode
    671220
  • Title

    Growth of Multi-Walled Carbon Nanotubes on platinum

  • Author

    Yunusa, Z. ; Hamidon, Mohd Nizar ; Rashid, Shaufiq Abd

  • Author_Institution
    Inst. of Adv. Technol., Univ. Putra Malaysia, Serdang, Malaysia
  • fYear
    2013
  • fDate
    25-27 Sept. 2013
  • Firstpage
    363
  • Lastpage
    366
  • Abstract
    In this paper, Multi-Walled Carbon Nanotubes were grown on a surface of a substrate that consists of a quartz piezoelectric substrate with titanium under layer and platinum electrodes. The Carbon Nanotubes (CNT) was grown using thermal CVD with Iron Nitrate as the catalyst. The growth of the carbon nanotubes was carried out at a temperature of 8000C with hydrogen as the process gas and benzene as the hydrocarbon. Characterization of the as grown CNT was done using Scanning Electron Microscope (SEM) and Raman Spectroscopy. The Raman spectroscopy was carried out on a selected area of 100micron by 100 micron and the peaks of the D-band, G-band and the second order modes were observed from the Raman spectra. Image j image processing software was also used for the extraction of the diameter of the nanotube in which the average diameter was computed to be 46nm.
  • Keywords
    Raman spectra; carbon nanotubes; chemical vapour deposition; image processing; nanofabrication; scanning electron microscopy; C-Pt; D-band peaks; G-band peaks; Raman spectra; SEM; Scanning Electron Microscope; SiO2-Ti-Pt; benzene hydrocarbon; grown CNT; hydrogen process gas; image j image processing software; iron nitrate catalyst; multiwalled carbon nanotube growth; nanotube diameter extraction; platinum electrodes; quartz piezoelectric substrate; second order modes; substrate surface; temperature 800 degC; thermal CVD; titanium under layer; Carbon nanotubes; Electrodes; Platinum; Raman scattering; Scanning electron microscopy; Sensors; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro and Nanoelectronics (RSM), 2013 IEEE Regional Symposium on
  • Conference_Location
    Langkawi
  • Print_ISBN
    978-1-4799-1181-3
  • Type

    conf

  • DOI
    10.1109/RSM.2013.6706551
  • Filename
    6706551