Title :
Table of contents
Abstract :
The following topics are dealt with: MEMS; microsensors; VLSI; microwave circuits; photonics and nanotechnology.
Keywords :
VLSI; micromechanical devices; microsensors; microwave integrated circuits; nanophotonics; nanotechnology; MEMS; VLSI; microsensors; microwave circuits; nanotechnology; photonics;
Conference_Titel :
Micro and Nanoelectronics (RSM), 2013 IEEE Regional Symposium on
Conference_Location :
Langkawi
Print_ISBN :
978-1-4799-1181-3
DOI :
10.1109/RSM.2013.6706564
