Title :
A simple printable etchant formulation for etching oxidic, transparent and conductive layers
Author :
Shin-Shin Wang ; Sui-Hui Wu ; Jyh-Horung Chen
Author_Institution :
Dept. of Org. Chem., Ind. Technol. Res. Inst., Hsinchu, Taiwan
Abstract :
In this paper we present a simple printable etchant formulation for etching uniform lines having a width about 60 μm on a crystalline ITO thin film. The etching media can be removed from the treated surface after etching by water without leaving residues that is eco-friendly.
Keywords :
etching; indium compounds; semiconductor thin films; tin compounds; ITO; conductive layer; crystalline ITO thin film; etching media; printable etchant formulation; surface treatment; transparent layer; Conductive films; Etching; Indium tin oxide; Printing; Substrates; Viscosity; Tin-doped indium oxide (ITO); eco-friendly; etching; formulation; printable etchant;
Conference_Titel :
Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT), 2013 8th International
Conference_Location :
Taipei
DOI :
10.1109/IMPACT.2013.6706675
