DocumentCode
673107
Title
Development of electrothermal microactuator using a low environmental load polymer
Author
Amaya, S. ; Sugiyama, Shunsuke
Author_Institution
Kamitoba, TOWA Corp., Kyoto, Japan
fYear
2013
fDate
10-13 Nov. 2013
Firstpage
1
Lastpage
5
Abstract
This paper presents an environment friendly fabrication technology of MEMS devices using biodegradable polymer material applying hot embossing and polishing process. The capability of the method was demonstrated through the fabrication and tested of a polylactic acid (PLA) thermal microactuator. The displacement was about 11 times larger than that of a Si counterpart. In this research, a monolithic PLA thermal microactuator has been developed as low environmental load device.
Keywords
embossing; microactuators; microfabrication; polymers; MEMS devices; biodegradable polymer material; electrothermal microactuator; environment-friendly fabrication technology; hot embossing; low-environmental load device; low-environmental load polymer; monolithic PLA thermal microactuator; polishing process; polylactic acid thermal microactuator; silicon counterpart; Bonding; Embossing; Polymers; Programmable logic arrays; Silicon; Temperature measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro-NanoMechatronics and Human Science (MHS), 2013 International Symposium on
Conference_Location
Nagoya
Print_ISBN
978-1-4799-1527-9
Type
conf
DOI
10.1109/MHS.2013.6710401
Filename
6710401
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