Title :
Development of electrothermal microactuator using a low environmental load polymer
Author :
Amaya, S. ; Sugiyama, Shunsuke
Author_Institution :
Kamitoba, TOWA Corp., Kyoto, Japan
Abstract :
This paper presents an environment friendly fabrication technology of MEMS devices using biodegradable polymer material applying hot embossing and polishing process. The capability of the method was demonstrated through the fabrication and tested of a polylactic acid (PLA) thermal microactuator. The displacement was about 11 times larger than that of a Si counterpart. In this research, a monolithic PLA thermal microactuator has been developed as low environmental load device.
Keywords :
embossing; microactuators; microfabrication; polymers; MEMS devices; biodegradable polymer material; electrothermal microactuator; environment-friendly fabrication technology; hot embossing; low-environmental load device; low-environmental load polymer; monolithic PLA thermal microactuator; polishing process; polylactic acid thermal microactuator; silicon counterpart; Bonding; Embossing; Polymers; Programmable logic arrays; Silicon; Temperature measurement;
Conference_Titel :
Micro-NanoMechatronics and Human Science (MHS), 2013 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
978-1-4799-1527-9
DOI :
10.1109/MHS.2013.6710401
