• DocumentCode
    675252
  • Title

    Fabrication of Mgo:LiNbO3 thin film ridge waveguide by surface-activated bonding and ion slicing

  • Author

    Tanaka, Kiyoshi ; Suhara, Toshiaki

  • Author_Institution
    Grad. Sch. of Eng., Osaka Univ., Suita, Japan
  • fYear
    2013
  • fDate
    27-30 Oct. 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We report the fabrication of MgO:LiNbO3 waveguides by surface-activated bonding with Au layers and ion slicing. He+ ions were used for implantation. The films of 1 μm thickness were obtained on SiO2/Au layers. The ridge waveguides are also demonstrated. We achieved strong optical confinement at 1550 nm wavelength.
  • Keywords
    gold; helium; ion implantation; lithium compounds; magnesium compounds; optical fabrication; optical films; optical waveguides; ridge waveguides; silicon compounds; LiNbO3:MgO-Au-SiO2; ion implantation; ion slicing; optical confinement; size 1 mum; surface-activated bonding; thin film ridge waveguide; wavelength 1550 nm; Bonding; Crystals; Gold; Optical device fabrication; Optical surface waves; Optical waveguides;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microoptics Conference (MOC), 2013 18th
  • Conference_Location
    Tokyo
  • Type

    conf

  • Filename
    6715149
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=675252