T-Shape Suspended Silicon Nitride Ring Resonator for Optical Sensing Applications

Author

Jijun Feng ; Akimoto, Ryoichi

Author_Institution

Electron. & Photonics Res. Inst., Nat. Inst. of Adv. Ind. Sci. & Technol., Tsukuba, Japan

Volume

27

Issue

15

fYear

2015

fDate

Aug.1, 1 2015

Firstpage

1601

Lastpage

1604

Abstract

A T-shape suspended silicon nitride racetrack ring resonator sitting on a silicon dioxide pedestal is experimentally demonstrated. Compared with unsuspended device, it allows an enhanced interaction with the surrounded environment while maintaining a high quality factor. The resonator consists of a directional coupler with a waveguide width of 1.3 μm and a ring structure with curve radius of 20 μm. More than 1.6 × 104 quality factor at a wavelength of 1550.4 nm can be obtained, with a moderate extinction ratio of ~9.2 dB and a free-spectral range of 5.48 nm. The measured device sensitivity is ~247 nm/RIU. The device is expected to have a wide optical sensing application prospect.

Keywords

Q-factor; integrated optics; optical directional couplers; optical resonators; optical sensors; optical waveguides; silicon compounds; T-shape suspended silicon nitride ring resonator; device sensitivity; directional coupler; extinction ratio; free-spectral range; high quality factor; optical sensing; radius 20 mum; silicon dioxide pedestal; size 1.3 mum; waveguide; wavelength 1550.4 nm; wavelength 5.48 nm; Couplings; Optical ring resonators; Optical sensors; Optical waveguides; Sensitivity; Silicon nitride; Optical resonance; integrated optics; sensitivity; silicon nitride; suspended;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2015.2432124

Filename

7109139