Design of a single-plane two-dimensional micropositioning stage based on the oval amplification mechanism

Author

Yangqin Gu ; Liguo Chen ; Jizhu Liu ; Tao Chen ; Mingqiang Pan ; Yangjun Wang ; Lining Sun

Author_Institution

Robot. & Microsyst. Centre, Soochow Univ., Suzhou, China

fYear

2013

fDate

26-28 Aug. 2013

Firstpage

1147

Lastpage

1152

Abstract

In order to improve the dynamic stability, the response speed and positioning accuracy, the oval amplification mechanisms and flexible hinges are added to the integrated two-dimensional micro-positioning stage, which makes the stage have two-dimensional motion in a single plane and effectively reduce its volume. The effects of the parameters of the oval amplification mechanism and flexible hinge on the stiffness and the output displacement of the micro-positioning stage are analyzed with the theoretical analysis and finite element method. Combining with the dynamic characteristics analysis, the results show that the designed micro-positioning stage has high dynamic stability and small displacement coupling.

Keywords

elastic constants; finite element analysis; hinges; micropositioning; motion control; stability; displacement coupling; dynamic characteristic analysis; dynamic stability; finite element method; flexible hinges; output displacement; oval amplification mechanism; positioning accuracy; response speed; single-plane two-dimensional micropositioning stage; stiffness; two-dimensional motion; Accuracy; Couplings; Fasteners; Finite element analysis; Force; Stress; Vibrations; displacement coupling; dynamic stability; flexible hinge; stiffness; the oval amplification mechanism;

fLanguage

English

Publisher

ieee

Conference_Titel

Information and Automation (ICIA), 2013 IEEE International Conference on

Conference_Location

Yinchuan

Type

conf

DOI

10.1109/ICInfA.2013.6720468

Filename

6720468