Title :
Modelling of cantilever based MEMS RF switch
Author :
Muley, Chaitali Anil ; Naveed, Syed A.
Author_Institution :
J.N.E.C., Electron. Dept., Dr. Babasaheb Ambedkar Marathwada Univ., Aurangabad, India
Abstract :
This paper deals with the electro-mechanical and electro-magnetic model of an electro statically actuated RF MEMS switch, Simple 1-D model for pull-in voltage is presented, along with the 2-port equivalent circuit network representation used for series switch. The Mechanical, Electrostatic and Electromagnetic analysis of the designed miniature RF MEMS cantilever beam is performed using COVENTORWARE tool. RF characterization has been carried out in the range of 1 to 40 GHz to provide return loss (S11), insertion loss (S21) between up (un-actuated) and down (actuated) states of the RF MEMS beam. It has been seen that the switch, so designed, results in low-loss performance.
Keywords :
electrostatic actuators; equivalent circuits; microswitches; microwave switches; cantilever based MEMS RF switch; electromagnetic analysis; electromagnetic model; electromechanical model; electrostatic analysis; electrostatically actuated RF MEMS switch; frequency 1 GHz to 40 GHz; mechanical analysis; pull in voltage; two port equivalent circuit network; Electrodes; Force; Micromechanical devices; Microswitches; Radio frequency; Structural beams; Electrostatic model Electromagnetic model; Insertion loss; Isolation; Mechanical model; Return loss;
Conference_Titel :
Computing, Communications and Networking Technologies (ICCCNT),2013 Fourth International Conference on
Conference_Location :
Tiruchengode
Print_ISBN :
978-1-4799-3925-1
DOI :
10.1109/ICCCNT.2013.6726806
