Design and analysis of high performance MEMS capacitive pressure sensor for TPMS

Author

Sharma, Ashok ; Singh, Jaskirat

Author_Institution

PDPM-Indian Inst. of Inf. Technol., Design & Manuf., Jabalpur, India

fYear

2013

fDate

16-18 Dec. 2013

Firstpage

1

Lastpage

5

Abstract

In this paper, an analytical and simulation solution has been developed for Micro electromechanical systems (MEMS) based capacitive pressure sensor which finds application in Tyre pressure monitoring system (TPMS). The device simulations, both static and dynamic have been carried out using Intellisuite software. The result shows that, capacitance varies linearly with applied pressure. Its sensitivity came out to be 0.12 fF/KPa within the pressure range of 0-300 KPa. The static results obtained by simulation are in agreement with the theoretical one. The dynamic analysis gives natural frequency and response time of diaphragm.

Keywords

capacitive sensors; computerised monitoring; microfabrication; microsensors; pressure sensors; tyres; Intellisuite software; MEMS capacitive pressure sensor; TPMS; diaphragm; microelectromechanical system; pressure 0 kPa to 300 kPa; tyre pressure monitoring system; Capacitance; Electrodes; Equations; Mathematical model; Micromechanical devices; Sensitivity; Tires; Intellisuite; MEMS; TPMS; capacitive pressure sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Control, Automation, Robotics and Embedded Systems (CARE), 2013 International Conference on

Conference_Location

Jabalpur

Type

conf

DOI

10.1109/CARE.2013.6733713

Filename

6733713