Title :
SU-8 2000 Millimeter Wave Material Characterization
Author :
Pierce, Richard G. ; Islam, Rashed ; Henderson, Rashaunda M. ; Blanchard, Andrew
Author_Institution :
Dept. of Electr. Eng., Univ. of Texas at Dallas, Richardson, TX, USA
Abstract :
SU-8 2000 is an epoxy based photoresist widely used in the fabrication of MEMS for its thick film capability. SU-8 also holds promise as a low cost material for millimeter wave packaging and devices where thick films are required. This letter investigates the electrical material properties of SU-8 2000 at frequencies beyond 140 GHz. Characterization using microstrip ring and T resonators reveal a dielectric constant of 3.0 across the entire band with an approximate loss tangent of 0.04.
Keywords :
electronics packaging; microstrip circuits; millimetre wave devices; photoresists; resonators; MEMS; SU-8 2000 millimeter wave material characterization; T resonators; dielectric constant; electrical material properties; epoxy based photoresist; microstrip ring; millimeter wave devices; millimeter wave packaging; thick film capability; Dielectric constant; Dielectric loss measurement; Loss measurement; Materials; Microstrip; Millimeter wave measurements; Dielectric losses; SU-8; dielectric substrates; millimeter wave measurements; parameter extraction;
Journal_Title :
Microwave and Wireless Components Letters, IEEE
DOI :
10.1109/LMWC.2014.2313475
