SU-8 2000 Millimeter Wave Material Characterization

Author

Pierce, Richard G. ; Islam, Rashed ; Henderson, Rashaunda M. ; Blanchard, Andrew

Author_Institution

Dept. of Electr. Eng., Univ. of Texas at Dallas, Richardson, TX, USA

Volume

24

Issue

6

fYear

2014

fDate

Jun-14

Firstpage

427

Lastpage

429

Abstract

SU-8 2000 is an epoxy based photoresist widely used in the fabrication of MEMS for its thick film capability. SU-8 also holds promise as a low cost material for millimeter wave packaging and devices where thick films are required. This letter investigates the electrical material properties of SU-8 2000 at frequencies beyond 140 GHz. Characterization using microstrip ring and T resonators reveal a dielectric constant of 3.0 across the entire band with an approximate loss tangent of 0.04.

Keywords

electronics packaging; microstrip circuits; millimetre wave devices; photoresists; resonators; MEMS; SU-8 2000 millimeter wave material characterization; T resonators; dielectric constant; electrical material properties; epoxy based photoresist; microstrip ring; millimeter wave devices; millimeter wave packaging; thick film capability; Dielectric constant; Dielectric loss measurement; Loss measurement; Materials; Microstrip; Millimeter wave measurements; Dielectric losses; SU-8; dielectric substrates; millimeter wave measurements; parameter extraction;

fLanguage

English

Journal_Title

Microwave and Wireless Components Letters, IEEE

Publisher

ieee

ISSN

1531-1309

Type

jour

DOI

10.1109/LMWC.2014.2313475

Filename

6784331