Research on the calibration technique of on-wafer load-pull system

By using load-pull technique, non-linear device behavior can be obtained through changing the source impedance or load impedance. Load-pull system is so complex that there is no effective way for its performance metrology, which results in significant variance of device parameter, such as power, gain, and PAE. This paper discusses in-situ calibration of on-wafer load-pull system and provides the verified result. The technique mentioned in this paper can calibrate the performance of the on-wafer load-pull system reliably and roundly, and give the measurement uncertainty of the system. Thus the calibration scheme is more reasonable, while the measurement result is more reliable.