DocumentCode :
682192
Title :
Image processing-based technology for dirt detection of quartz wafer
Author :
Yang Wanhua ; Wang Yanlin ; Li Dong
Author_Institution :
Beijing Inf. Sci. & Technol. Univ., Beijing, China
Volume :
1
fYear :
2013
fDate :
16-19 Aug. 2013
Firstpage :
176
Lastpage :
178
Abstract :
Quartz wafer inevitably produces various physical defects in the production process. This paper focuses on the quartz wafer dirt defects, and proposes a way for image processing on the quartz wafer by using of computer vision library OpenCV. The proposed method is to find contours of the processed images to judge whether there is dirt or not. Experiments show that this method can well detect the dirt of quartz wafer.
Keywords :
computer vision; edge detection; feature extraction; image denoising; image segmentation; quartz; wafer level packaging; OpenCV 2.4.3; dirt detection; image processing-based technology; open source computer vision library; quartz wafer dirt defects; Computers; Conferences; Digital images; Image edge detection; Image segmentation; Noise; Production; OpenCV; dirt detection; image processing; quartz wafer;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Measurement & Instruments (ICEMI), 2013 IEEE 11th International Conference on
Conference_Location :
Harbin
Print_ISBN :
978-1-4799-0757-1
Type :
conf
DOI :
10.1109/ICEMI.2013.6743029
Filename :
6743029
Link To Document :
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