• DocumentCode
    682192
  • Title

    Image processing-based technology for dirt detection of quartz wafer

  • Author

    Yang Wanhua ; Wang Yanlin ; Li Dong

  • Author_Institution
    Beijing Inf. Sci. & Technol. Univ., Beijing, China
  • Volume
    1
  • fYear
    2013
  • fDate
    16-19 Aug. 2013
  • Firstpage
    176
  • Lastpage
    178
  • Abstract
    Quartz wafer inevitably produces various physical defects in the production process. This paper focuses on the quartz wafer dirt defects, and proposes a way for image processing on the quartz wafer by using of computer vision library OpenCV. The proposed method is to find contours of the processed images to judge whether there is dirt or not. Experiments show that this method can well detect the dirt of quartz wafer.
  • Keywords
    computer vision; edge detection; feature extraction; image denoising; image segmentation; quartz; wafer level packaging; OpenCV 2.4.3; dirt detection; image processing-based technology; open source computer vision library; quartz wafer dirt defects; Computers; Conferences; Digital images; Image edge detection; Image segmentation; Noise; Production; OpenCV; dirt detection; image processing; quartz wafer;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Measurement & Instruments (ICEMI), 2013 IEEE 11th International Conference on
  • Conference_Location
    Harbin
  • Print_ISBN
    978-1-4799-0757-1
  • Type

    conf

  • DOI
    10.1109/ICEMI.2013.6743029
  • Filename
    6743029