DocumentCode
682192
Title
Image processing-based technology for dirt detection of quartz wafer
Author
Yang Wanhua ; Wang Yanlin ; Li Dong
Author_Institution
Beijing Inf. Sci. & Technol. Univ., Beijing, China
Volume
1
fYear
2013
fDate
16-19 Aug. 2013
Firstpage
176
Lastpage
178
Abstract
Quartz wafer inevitably produces various physical defects in the production process. This paper focuses on the quartz wafer dirt defects, and proposes a way for image processing on the quartz wafer by using of computer vision library OpenCV. The proposed method is to find contours of the processed images to judge whether there is dirt or not. Experiments show that this method can well detect the dirt of quartz wafer.
Keywords
computer vision; edge detection; feature extraction; image denoising; image segmentation; quartz; wafer level packaging; OpenCV 2.4.3; dirt detection; image processing-based technology; open source computer vision library; quartz wafer dirt defects; Computers; Conferences; Digital images; Image edge detection; Image segmentation; Noise; Production; OpenCV; dirt detection; image processing; quartz wafer;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Measurement & Instruments (ICEMI), 2013 IEEE 11th International Conference on
Conference_Location
Harbin
Print_ISBN
978-1-4799-0757-1
Type
conf
DOI
10.1109/ICEMI.2013.6743029
Filename
6743029
Link To Document