Technique of non-linear surface form error on-line measurement

Most of the current methods of accurate surface form error measurement is only suitable for linear and regular surface, there is no available accurate method for non-linear surface. This paper fund an online surface form error measurement system based on Time domain least-square serial two-point method which been upgrade by self-adaptable error separation matrix technique for uplift its ability to measure non-linear surface. The self-adaptable error separation matrix technique is allowed adjustment being placed automatically to the error separation matrix for non-linear surface error separation without compromise the accuracy of the system. The comparison of the result from the simulation which was being run on a non-linear surface of 10*9 grids clearly shows that the error´s offset of the method in this paper is not larger than the random measurement error. Experimental results show that this method can work on the measurement of non-continuous, irregular surface without accuracy reduction.