DocumentCode
682903
Title
Spectroscopic ellipsometry characterization of thin film photovoltaic materials and devices
Author
Sestak, Michelle N. ; Yan, Lijun ; Eypert, Celine
Author_Institution
HORIBA Sci., Edison, NJ, USA
fYear
2013
fDate
16-21 June 2013
Firstpage
1445
Lastpage
1449
Abstract
One of the biggest challenges in the photovoltaic industry is creating a high efficiency device with low manufacturing and material costs. This challenge can be overcome by accurately characterizing thin film materials and photovoltaic device structures to determine properties such as thickness, absorption coefficient, composition, crystallinity, blend morphology, and phase separation, all of which may be modified to result in a more efficient photovoltaic device. One way to characterize thin film materials and photovoltaic device structures is to use spectroscopic ellipsometry, a non-invasive, non-destructive, and non-contact optical technique which can provide all of the above thin film properties, as well as other information, such as optical properties and band gap values. Spectroscopic ellipsometry works on the basis that linearly polarized light, when reflected off of a sample, becomes elliptically polarized. The resultant elliptical polarization state can be modeled in order to provide information about the sample. Because of the information it can provide, spectroscopic ellipsometry is a very powerful technique for the study of thin film photovoltaic materials and devices. In particular, spectroscopic ellipsometry can be applied to anti-reflection coatings, TCO layers, amorphous and micro-crystalline silicon thin films, and organic solar cell devices, as will be demonstrated here.
Keywords
absorption; antireflection coatings; organic semiconductors; phase separation; semiconductor thin films; silicon; solar cells; absorption coefficient; amorphous silicon thin films; antireflection coatings; band gap values; blend morphology; composition; crystallinity; elliptical polarization state; elliptically polarized; linearly polarized light; manufacturing costs; material costs; microcrystalline silicon thin films; noncontact optical technique; nondestructive optical technique; noninvasive optical technique; optical properties; organic solar cell devices; phase separation; photovoltaic device structures; photovoltaic industry; spectroscopic ellipsometry; spectroscopic ellipsometry characterization; thin film photovoltaic devices; thin film photovoltaic materials; thin film properties; Ellipsometry; Optical device fabrication; Optical films; Optical refraction; Optical sensors; Optical variables control; amorphous silicon; anti-reflection coatings; ellipsometry; micro-crystalline silicon; organic solar cells; transparent conducting oxides;
fLanguage
English
Publisher
ieee
Conference_Titel
Photovoltaic Specialists Conference (PVSC), 2013 IEEE 39th
Conference_Location
Tampa, FL
Type
conf
DOI
10.1109/PVSC.2013.6744416
Filename
6744416
Link To Document