Commercial size multicrytalline silicon solar cell with ion implant emitter

This paper reports on the preliminary results of the first manufacturable ion implanted multicrystalline silicon solar cells with mean efficiency of 16.60%. The best efficiency of 16.83% is demonstrated, which is the highest reported ion implanted 243.4 cm2 multicrystalline silicon solar cell with Al back surface field. A dose of 2.8E15 atom.cm2 at 15-keV was used and annealed at implant anneal similar to the mono crystalline solar cell counterparts. The open circuit voltage of ~621 mV and the measured internal quantum efficiency (IQE) were similar to multicrystalline cells using POCl3 emitter. This results is very promising and confirms that the bulk lifetime does not degrade during the implant anneal.