Piezoelectric actuator design with micro positioning capability and it´s practical implementation: Fuzzy approach

Due to the developments of precision industrial machineries, the microscale positioning ability for the relative apparatus requires small size and high accuracy, and the piezoelectric actuator is one of means has this feature hence piezoelectric actuator plays an important role in this field for its microscale movement ability. Unfortunately, the nonlinear hysteresis phenomenon of piezoelectric materials, and modeling uncertainties of piezoelectric actuators lead to control difficulties and strongly reduce the positioning accuracy of piezoelectric actuators. Based on the above reasons, a novel control design combined with feedback linearization, fuzzy modeling approximation, and robust control concept are proposed for dealing with the micrometer (μm) positioning problem of piezoelectric actuators. From the simulation results, it is obvious that our proposed control law yields the excellent control performance than the conventional control designs. Finally, this proposed method is practically performed for the verification of positioning performance. After the practical testing, the controlled piezoelectric actuator possesses a positioning accuracy of 1 μm.