Title :
Terahertz non-invasive sub-surface nano-scanner
Author :
Rahman, Aminur ; Rahman, A.K.
Author_Institution :
Appl. Res. & Photonics, Harrisburg, PA, USA
Abstract :
A terahertz sub-surface scanner is introduced that utilizes reflection mode non-contact interrogation of surfaces and interior layers of composite substrates with resolution of ~1 nm. Quantitative measurements are done by implementing a modified Beer-Lambert´s law.
Keywords :
composite materials; light reflection; nanophotonics; optical variables measurement; terahertz spectroscopy; terahertz waves; composite substrates; modified Beer-Lambert law; reflection mode; terahertz noninvasive subsurface nanoscanner; Nonlinear optics; Photonics; Reflection; Semiconductor device measurement; Spectroscopy; Substrates; Nonlinear optics: 190.3970 Microparticle nonlinear optics; Spectroscopy: 300.6470 Spectroscopy; Spectroscopy: 300.6495 Spectroscopy; semiconductors; terahertz;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
