DocumentCode
688598
Title
Free z-focus control laser processing via ultra-high speed axial scanning
Author
Duocastella, Marti ; Arnold, Craig B.
Author_Institution
Dept. of Mech. & Aerosp. Eng., Princeton Univ., Princeton, NJ, USA
fYear
2013
fDate
9-14 June 2013
Firstpage
1
Lastpage
2
Abstract
An ultra-high speed axial scanner is used to enhance the depth of field of a laser system without sacrificing lateral resolution. This new approach eliminates the classic constraint of precise z-focus control in laser processing.
Keywords
high-speed optical techniques; image resolution; laser materials processing; optical control; optical focusing; optical scanners; depth-of-field enhancement; free z-focus control laser processing; lateral resolution; ultra-high speed axial scanner; ultra-high speed axial scanning; Laser beams; Lasers; Lenses; Measurement by laser beam; Process control; Silicon; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6832972
Link To Document