DocumentCode :
688614
Title :
Low temperature a-SiGe:H Near-IR sensor and photovoltaic devices for flexible multi-functional panel
Author :
Ming-Hsuan Kao ; Jia-Min Shieh ; Chang-Hong Shen ; Peichen Yu ; Hao-Chung Kuo ; Ching-Ting Lee ; Fu-Liang Yang
Author_Institution :
Inst. of Electro-Opt. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
fYear :
2013
fDate :
9-14 June 2013
Firstpage :
1
Lastpage :
2
Abstract :
High Near-IR response photo-diode (0.1A/W@800nm) and high efficiency a-Si/a-SiGe tandem solar cell (8.38%) were demonstrated using high-density plasma fabricated a-SiGe:H deposition technology with Si2H6 and GeH4 precursor. The low temperature (140°C) a-SiGe:H films with low defect density (2.3×1016cm-3)are suitable for the applications of flexible solar self-powered multi-functional panel and 3D stacked monolithic devices.
Keywords :
amorphous semiconductors; flexible electronics; infrared detectors; photodiodes; silicon compounds; solar cells; 3D stacked monolithic devices; SiGe:H; defect density; low temperature a-SiGe:H near-IR sensor; photodiode; photovoltaic devices; solar self-powered multifunctional panel; temperature 140 degC; Integrated optics; Optical device fabrication; Optical films; Photovoltaic cells; Plasma temperature; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
Type :
conf
Filename :
6832989
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=688614
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