Title :
Optically-transparent actuators and micro-mechanical systems fabricated using femtosecond lasers
Author :
Bellouard, Yves ; Lenssen, Bo ; Tielen, Viktor ; Tao Yang
Author_Institution :
Mech. Eng. Dept., Eindhoven Univ. of Technol., Eindhoven, Netherlands
Abstract :
Non-linear laser-matter interaction offers the possibility to structure transparent material in three dimensions. Here, we demonstrate that such process can be implemented for fabricating novel type of microsystems, including actuators transparent to visible light.
Keywords :
high-speed optical techniques; laser materials processing; micro-optomechanical devices; microactuators; microfabrication; optical fabrication; transparency; femtosecond lasers; micromechanical systems; microsystems; nonlinear laser-matter interaction; optically-transparent actuators; transparent material; visible light; Actuators; Nonlinear optics; Optical device fabrication; Optical imaging; Optical interferometry; Silicon compounds; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
