Title :
High-speed 3D direct laser writing of micro-optical elements
Author :
Radke, Andre ; Fries, Benjamin ; Eicke, Dirk ; Niesler, Fabian ; Baretzky, Clemens ; Buckmann, Tiemo ; Wegener, Martin ; Thiel, Michael
Author_Institution :
Nanoscribe GmbH, Eggenstein-Leopoldshafen, Germany
Abstract :
We demonstrate high-speed diffraction-limited 3D direct laser writing using pivoted galvo mirrors. High photoresist curing speeds and stitching of individual scan fields allow for the fabrication of diffractive and refractive micro-optical elements on large areas.
Keywords :
curing; diffractive optical elements; laser materials processing; light refraction; microfabrication; micromirrors; optical fabrication; photoresists; diffractive microoptical elements; high photoresist curing speed; high-speed diffraction-limited 3D direct laser writing; pivoted galvo mirrors; refractive microoptical elements; scan fields; High-speed optical techniques; Optical device fabrication; Optical diffraction; Optical sensors; Photonic crystals; Three-dimensional displays;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
