Title :
High-Q resonators on Bi-layer Si platform using wafer bonding
Author :
Moradinejad, Hesam ; Atabaki, Amir H. ; Hosseinia, Amir H. ; Eftekhar, Ali Asghar ; Adibi, Ali
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
We report the development of a high quality bi-layer silicon material platform using wafer bonding. We have experimentally demonstrated high quality-factor resonators (>200,000) in this material platform for both TE and TM polarizations.
Keywords :
Q-factor; integrated optics; light polarisation; optical fabrication; optical materials; optical multilayers; optical resonators; silicon; wafer bonding; Si; TE polarization; TM polarization; high quality bilayer silicon material platform; high quality-factor resonator; wafer bonding; Decision support systems;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
