• DocumentCode
    688963
  • Title

    Fabrication of high-purity single-crystal diamond nano-slabs for photonic applications

  • Author

    Luozhou Li ; Hodges, J.S. ; Chen, Edward H. ; Trusheim, Matthew ; Gaathon, Ophir ; Ming Lu ; Bayn, Igal ; Schroder, Tim ; Xiaolong Hu ; Englund, Dirk

  • Author_Institution
    Dept. of Electr. Eng., Columbia Univ., New York, NY, USA
  • fYear
    2013
  • fDate
    9-14 June 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We present a mass fabrication method of diamond nanoscale slabs by alternating plasma etching and mask deposition. These slabs support NV- spins with long coherence times and are suitable for a range of nanophotonic devices.
  • Keywords
    diamond; light coherence; nanofabrication; nanophotonics; optical fabrication; sputter etching; NV- spins; coherence times; high-purity single-crystal diamond nanoslabs; mask deposition; nanophotonic devices; plasma etching; Coherence; Diamonds; Etching; Fabrication; Photonic crystals; Photonics; Slabs;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2013 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6833343
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=688963