Title :
Silicon-on-nitride optical waveguides for mid- and near-infrared integrated photonics
Author :
Khan, Sharifullah ; Chiles, Jeff ; Ma, Jiaxin ; Fathpour, Sasan
Author_Institution :
CREOL, The Coll. of Opt. & Photonics, Univ. of Central Florida, Orlando, FL, USA
Abstract :
Silicon-on-nitride waveguides are demonstrated at mid- and near-infrared wavelengths. The fabrication is based on bonding silicon to silicon-on-insulator dies coated with low-stress silicon nitride. At 3.39 μm wavelength, the measured propagation loss is ~5 dB/cm.
Keywords :
elemental semiconductors; integrated optics; light propagation; optical fabrication; optical losses; optical waveguides; silicon; silicon compounds; silicon-on-insulator; Si-SiNx; coating; low-stress silicon nitride; mid-infrared integrated photonics; mid-infrared wavelength; near-infrared integrated photonics; near-infrared wavelength; red propagation loss; silicon-on-insulator dies; silicon-on-nitride optical waveguides; wavelength 3.39 mum; Optical device fabrication; Optical waveguides; Photonics; Propagation losses; Silicon; Temperature measurement;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
