Title :
Mid-infrared microphotonics using air-clad silicon pedestal structures
Author :
Pao Tai Lin ; Singh, V. ; Yan Cai ; Kimerling, Lionel C. ; Agarwal, Abhishek
Author_Institution :
Mater. Process. Center, Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
Towards Mid-Infrared silicon microphotonic circuits, we demonstrate broadband on-chip silicon structures including straight, bent waveguides, and beam splitters, utilizing a novel air-clad pedestal configuration. Transmission loss of 2.7 dB/cm is obtained at λ=3.7 um.
Keywords :
air; elemental semiconductors; integrated optics; micro-optics; optical beam splitters; optical losses; optical waveguides; silicon; waveguide discontinuities; Si; air-clad silicon pedestal structures; beam splitters; bent waveguides; broadband on-chip silicon structures; mid-infrared silicon microphotonics; straight waveguides; transmission loss; wavelength 3.7 mum; Optical attenuators; Optical device fabrication; Optical distortion; Optical imaging; Optical losses; Optical waveguides; Silicon;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
