• DocumentCode
    689028
  • Title

    Mid-infrared microphotonics using air-clad silicon pedestal structures

  • Author

    Pao Tai Lin ; Singh, V. ; Yan Cai ; Kimerling, Lionel C. ; Agarwal, Abhishek

  • Author_Institution
    Mater. Process. Center, Massachusetts Inst. of Technol., Cambridge, MA, USA
  • fYear
    2013
  • fDate
    9-14 June 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Towards Mid-Infrared silicon microphotonic circuits, we demonstrate broadband on-chip silicon structures including straight, bent waveguides, and beam splitters, utilizing a novel air-clad pedestal configuration. Transmission loss of 2.7 dB/cm is obtained at λ=3.7 um.
  • Keywords
    air; elemental semiconductors; integrated optics; micro-optics; optical beam splitters; optical losses; optical waveguides; silicon; waveguide discontinuities; Si; air-clad silicon pedestal structures; beam splitters; bent waveguides; broadband on-chip silicon structures; mid-infrared silicon microphotonics; straight waveguides; transmission loss; wavelength 3.7 mum; Optical attenuators; Optical device fabrication; Optical distortion; Optical imaging; Optical losses; Optical waveguides; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2013 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6833408