• DocumentCode
    689076
  • Title

    High-Q lithium niobate microring-resonators on silicon

  • Author

    Rabiei, Payam ; Jichi Ma ; Chiles, Jeff ; Khan, Sharifullah ; Fathpour, Sasan

  • Author_Institution
    Coll. of Opt. & Photonics, Univ. of Central Florida, Orlando, FL, USA
  • fYear
    2013
  • fDate
    9-14 June 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Submicron lithium niobate waveguides and resonators are demonstrated on silicon by a novel and reliable ion implantation and wafer bonding technique. Waveguide ridges are formed by selective oxidation of tantalum to avoid etching lithium niobate.
  • Keywords
    integrated optoelectronics; ion implantation; lithium compounds; micro-optics; microcavities; microfabrication; niobium compounds; optical fabrication; optical resonators; optical waveguides; oxidation; ridge waveguides; wafer bonding; LiNbO3-Si; high-Q lithium niobate microring-resonators; ion implantation technique; silicon; submicron lithium niobate waveguide ridges; tantalum oxidation; wafer bonding technique; Bonding; Lithium niobate; Optical resonators; Optical waveguides; Semiconductor device reliability; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2013 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6833457
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=689076