Title :
High-Q lithium niobate microring-resonators on silicon
Author :
Rabiei, Payam ; Jichi Ma ; Chiles, Jeff ; Khan, Sharifullah ; Fathpour, Sasan
Author_Institution :
Coll. of Opt. & Photonics, Univ. of Central Florida, Orlando, FL, USA
Abstract :
Submicron lithium niobate waveguides and resonators are demonstrated on silicon by a novel and reliable ion implantation and wafer bonding technique. Waveguide ridges are formed by selective oxidation of tantalum to avoid etching lithium niobate.
Keywords :
integrated optoelectronics; ion implantation; lithium compounds; micro-optics; microcavities; microfabrication; niobium compounds; optical fabrication; optical resonators; optical waveguides; oxidation; ridge waveguides; wafer bonding; LiNbO3-Si; high-Q lithium niobate microring-resonators; ion implantation technique; silicon; submicron lithium niobate waveguide ridges; tantalum oxidation; wafer bonding technique; Bonding; Lithium niobate; Optical resonators; Optical waveguides; Semiconductor device reliability; Silicon;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
