• DocumentCode
    689273
  • Title

    Eliminating structural loss in optomechanical resonators using elastic wave interference

  • Author

    Mian Zhang ; de Oliveira Luiz, Gustavo ; Shah, Shalin ; Nussenzveig, Paulo ; Wiederhecker, Gustavo S. ; Lipson, Michal

  • Author_Institution
    Sch. of Electr. & Comput. Eng., Cornell Univ., Ithaca, NY, USA
  • fYear
    2013
  • fDate
    9-14 June 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We theoretically and experimentally demonstrate that the support loss of double-disk optomechanical resonators can be minimized using destructive elastic wave interference. We show 100MHz Si3N4 resonators with mechanical quality factor of 104 at room temperature.
  • Keywords
    elastic waves; light interferometry; mechanical testing; micro-optomechanical devices; optical materials; optical resonators; silicon compounds; Si3N4; Si3N4 resonators; destructive elastic wave interference; double-disk optomechanical resonators; frequency 100 MHz; mechanical quality factor; room temperature; structural loss elimination; support loss; temperature 293 K to 298 K; Interference; Optical device fabrication; Optical imaging; Optical losses; Optical resonators; Optical surface waves; Q-factor;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2013 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6833656