Title :
Silicon-platformed nonlinear waveguide in lithium niobate membrane
Author :
Utsugida, Takuya ; Kurimura, Sunao ; Muranaka, Yusuke ; Mochizuki, Eiji ; Nakajima, Hiromasa
Author_Institution :
Nat. Inst. for Mater. Sci. (NIMS), Tsukuba, Japan
Abstract :
A novel waveguide structure in Mg:LN membrane was developed on Si platform by wet and dry etching processes. Periodically poled structure in the membrane achieved QPM SHG at telecommunication band.
Keywords :
elemental semiconductors; etching; lithium compounds; magnesium; membranes; optical fabrication; optical harmonic generation; optical waveguides; silicon; LiNbO3:Mg-Si; QPM SHG; Si; dry etching; lithium niobate membrane; periodically poled structure; quasiphase matching; second harmonic generation; silicon-platformed nonlinear waveguide; telecommunication band; wet etching; Nonlinear optics; Optical device fabrication; Optical harmonic generation; Optical sensors; Optical waveguides; Optical wavelength conversion; Silicon;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
