Title :
Plasma density measurement using a dispersion interferometer based on second-harmonic generation in orientation-patterned GaAs
Author :
Bamford, Douglas J. ; Cummings, Elizabeth A. ; Panasenko, Dmitriy ; Fenner, David B. ; Hensley, Joel M. ; Boivin, R.L. ; Carlstrom, T.N. ; Van Zeeland, M.A.
Author_Institution :
Phys. Sci. Inc., Pleasanton, CA, USA
Abstract :
A dispersion interferometer based on second-harmonic generation in orientation-patterned GaAs has been used to measure the line density of electrons in a radio-frequency plasma with a detection limit of 7 × 1016 m-2.
Keywords :
density measurement; electron density; gallium arsenide; high-frequency discharges; light interferometry; optical harmonic generation; plasma density; plasma diagnostics; GaAs; detection limit; dispersion interferometer; electron line density; orientation-patterned GaAs; plasma density measurement; radio-frequency plasma; second-harmonic generation; Crystals; Density measurement; Dispersion; Laser beams; Optical interferometry; Plasma measurements; Plasmas;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
