Title :
Si3N4 nanobeam optomechanical crystals
Author :
Davanco, Marcelo ; Chan, Jeffrey ; Safavi-Naeini, Amir H. ; Painter, Oskar ; Srinivasan, K.
Author_Institution :
Center for Nanoscale Sci. & Technol., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
Abstract :
We demonstrate sideband-resolved Si3N4 optomechanical crystals supporting 105 quality factor optical modes at 980 nm, coupled to GHz frequency mechanical modes. We also develop slot-mode-based geometries for enhanced optomechanical coupling and multimode applications.
Keywords :
Q-factor; nanophotonics; silicon compounds; GHz frequency mechanical modes; Si3N4; multimode applications; nanobeam optomechanical crystals; optical modes; optomechanical coupling; quality factor; slot-mode-based geometries; wavelength 980 nm; Integrated optics; Optical coupling; Optical device fabrication; Optical refraction; Optical resonators; Optical variables control; Optical wavelength conversion;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA