• DocumentCode
    689364
  • Title

    Realization of Tellurium-based all dielectric optical metamaterials using a multi-cycle deposition-etch process

  • Author

    Sheng Liu ; Ihlefeld, J.F. ; Dominguez, Jason ; Gonzales, Edward F. ; Bower, John Eric ; Burckel, Bruce D. ; Sinclair, Michael B. ; Brener, Igal

  • Author_Institution
    Sandia Nat. Lab., Albuquerque, NM, USA
  • fYear
    2013
  • fDate
    9-14 June 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Tellurium dielectric resonator metamaterials were fabricated using a newly developed multi-cycle deposition-etch process. Deposition and etching of Tellurium were studied in detail. All the samples showed two transmission minima corresponding to magnetic and electric dipole resonances.
  • Keywords
    dielectric materials; etching; micro-optics; microfabrication; optical fabrication; optical metamaterials; optical resonators; tellurium; Te; electric dipole resonances; magnetic dipole resonances; multicycle deposition-etch process; tellurium dielectric resonator metamaterial fabrication; tellurium-based all dielectric optical metamaterial fabrication; Dielectrics; Fabrication; Laboratories; Magnetic materials; Magnetic resonance; Metamaterials; Optical resonators;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2013 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6833747
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=689364