Title :
Realization of Tellurium-based all dielectric optical metamaterials using a multi-cycle deposition-etch process
Author :
Sheng Liu ; Ihlefeld, J.F. ; Dominguez, Jason ; Gonzales, Edward F. ; Bower, John Eric ; Burckel, Bruce D. ; Sinclair, Michael B. ; Brener, Igal
Author_Institution :
Sandia Nat. Lab., Albuquerque, NM, USA
Abstract :
Tellurium dielectric resonator metamaterials were fabricated using a newly developed multi-cycle deposition-etch process. Deposition and etching of Tellurium were studied in detail. All the samples showed two transmission minima corresponding to magnetic and electric dipole resonances.
Keywords :
dielectric materials; etching; micro-optics; microfabrication; optical fabrication; optical metamaterials; optical resonators; tellurium; Te; electric dipole resonances; magnetic dipole resonances; multicycle deposition-etch process; tellurium dielectric resonator metamaterial fabrication; tellurium-based all dielectric optical metamaterial fabrication; Dielectrics; Fabrication; Laboratories; Magnetic materials; Magnetic resonance; Metamaterials; Optical resonators;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
