DocumentCode
689426
Title
Real-time depth monitoring of galvo-telecentric laser machining by inline coherent imaging
Author
Ji, Yuefeng ; Van Vlack, C. ; Webster, P.J.L. ; Fraser, J.M.
Author_Institution
Dept. of Phys., Queen´s Univ., Kingston, ON, Canada
fYear
2013
fDate
9-14 June 2013
Firstpage
1
Lastpage
2
Abstract
We achieve in situ, micron-scale tracking of laser machining through a galvo-telecentric beam delivery system using coherent imaging. We collect both high speed intrapulse and interpulse morphology changes as well as overall sweep-to-sweep depth penetration.
Keywords
galvanometers; high-speed optical techniques; laser beam machining; light coherence; optical images; optical tracking; galvo-telecentric beam delivery system; galvo-telecentric laser machining; high speed interpulse morphology changes; high speed intrapulse morphology changes; micron-scale optical tracking; optical coherent imaging; real-time depth monitoring; sweep-to-sweep depth penetration; Imaging; Laser beams; Machining; Materials; Measurement by laser beam; Monitoring; Real-time systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6833810
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