DocumentCode :
689485
Title :
ISO compliant M2 measurement using a quadriwave lateral shearing interferometer wave front sensor
Author :
Doudet, Ivan ; Prevost, Vincent ; Wattellier, Benoit
Author_Institution :
PHASICS SA, Palaiseau, France
fYear :
2013
fDate :
9-14 June 2013
Firstpage :
1
Lastpage :
2
Abstract :
We validate the use of a quadriwave lateral shearing Wave Front Sensor (WFS) to make an ISO compliant M2 measurement. We compare measurements made following the ISO standard method with those made with the WFS.
Keywords :
ISO standards; light interferometers; optical testing; wavefront sensors; ISO compliant M2 measurement; ISO standard method; WFS; quadriwave lateral shearing interferometer wave front sensor; ISO; ISO standards; Laser beams; Measurement by laser beam; Position measurement; Shearing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
Type :
conf
Filename :
6833869
Link To Document :
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