• DocumentCode
    689588
  • Title

    Double-layer silicon waveguides in standard silicon for 3D photonics

  • Author

    Chia-Ming Chang ; Solgaard, Olav

  • Author_Institution
    E.L. Ginzton Lab., Stanford Univ., Stanford, CA, USA
  • fYear
    2013
  • fDate
    9-14 June 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We demonstrate a 3D photonic technology for fabrication of double-layer silicon waveguides in standard silicon. This technology eliminates the need for silicon-on-insulator (SOI) wafers and can be further expanded to multiple-layer photonics for different applications.
  • Keywords
    elemental semiconductors; integrated optics; optical fabrication; optical multilayers; optical waveguides; silicon; 3D photonics; Si; double-layer silicon waveguides; multiple-layer photonics; standard silicon; Optical device fabrication; Optical waveguides; Photonics; Silicon; Standards; Three-dimensional displays;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2013 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6833975
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=689588