Title :
Double-layer silicon waveguides in standard silicon for 3D photonics
Author :
Chia-Ming Chang ; Solgaard, Olav
Author_Institution :
E.L. Ginzton Lab., Stanford Univ., Stanford, CA, USA
Abstract :
We demonstrate a 3D photonic technology for fabrication of double-layer silicon waveguides in standard silicon. This technology eliminates the need for silicon-on-insulator (SOI) wafers and can be further expanded to multiple-layer photonics for different applications.
Keywords :
elemental semiconductors; integrated optics; optical fabrication; optical multilayers; optical waveguides; silicon; 3D photonics; Si; double-layer silicon waveguides; multiple-layer photonics; standard silicon; Optical device fabrication; Optical waveguides; Photonics; Silicon; Standards; Three-dimensional displays;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
