Title :
Edge self-interference of a laser beam and application to thin film metrology
Author :
Do, P.A. ; Touaibia, Mohamed ; Hache, A.
Author_Institution :
Dept. of Phys. & Astron., Thin Films & Photonics Res. Group (GCMP), Univ. de Moncton, Moncton, NB, Canada
Abstract :
A method for measuring optical thickness changes in a thin film using a single laser beam is proposed and demonstrated. Theory suggests that when a half plane phase shift is applied to a Gaussian laser beam, interference fringes appear in the far field which position varies with the amount of phase shift. By measuring fringe pattern displacements, we demonstrate detection of optical changes in microns-thick chitosan films induced by temperature rises of a few degrees centigrade. Potential use for surface temperature measurements and other applications are discussed.
Keywords :
Gaussian processes; displacement measurement; light interference; measurement by laser beam; temperature measurement; thickness measurement; thin films; Gaussian laser beam; edge self-interference fringe pattern displacement measurement; microns-thick chitosan films; optical thickness change measurement; surface temperature measurements; thin film metrology; Laser beams; Laser theory; Measurement by laser beam; Optical films; Optical variables measurement; Temperature measurement;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
