Edge self-interference of a laser beam and application to thin film metrology

Author

Do, P.A. ; Touaibia, Mohamed ; Hache, A.

Author_Institution

Dept. of Phys. & Astron., Thin Films & Photonics Res. Group (GCMP), Univ. de Moncton, Moncton, NB, Canada

fYear

2013

fDate

9-14 June 2013

Firstpage

1

Lastpage

2

Abstract

A method for measuring optical thickness changes in a thin film using a single laser beam is proposed and demonstrated. Theory suggests that when a half plane phase shift is applied to a Gaussian laser beam, interference fringes appear in the far field which position varies with the amount of phase shift. By measuring fringe pattern displacements, we demonstrate detection of optical changes in microns-thick chitosan films induced by temperature rises of a few degrees centigrade. Potential use for surface temperature measurements and other applications are discussed.

Keywords

Gaussian processes; displacement measurement; light interference; measurement by laser beam; temperature measurement; thickness measurement; thin films; Gaussian laser beam; edge self-interference fringe pattern displacement measurement; microns-thick chitosan films; optical thickness change measurement; surface temperature measurements; thin film metrology; Laser beams; Laser theory; Measurement by laser beam; Optical films; Optical variables measurement; Temperature measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics (CLEO), 2013 Conference on

Conference_Location

San Jose, CA

Type

conf

Filename

6834100