• DocumentCode
    689720
  • Title

    Design, fabrication, and testing of a Pd-based integrated optical hydrogen sensor

  • Author

    Carriere, Nicholas ; Bahrami, F. ; Alam, M.Z. ; Mojahedi, M. ; Aitchison, J.S.

  • Author_Institution
    Edward S. Rogers Sr. Dept. of Electr. & Comput. Eng., Univ. of Toronto, Toronto, ON, Canada
  • fYear
    2013
  • fDate
    9-14 June 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    A palladium-based integrated optical hydrogen sensor on a silicon-on-insulator platform was designed, fabricated, and tested. The sensitivity and response time of the sensor was recorded for hydrogen concentrations varying from 0-4%.
  • Keywords
    gas sensors; hydrogen; integrated optics; optical design techniques; optical fabrication; optical sensors; optical testing; palladium; silicon-on-insulator; H2; Pd; hydrogen concentration; palladium-based integrated optical hydrogen sensor; silicon-on-insulator platform; Hydrogen; Lattices; Optical device fabrication; Optical films; Optical sensors; Optical waveguides; Time factors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2013 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6834107
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=689720