• DocumentCode
    689728
  • Title

    Laser diagnostics as a tool to improve combustion based atmospheric SiO2 layer deposition

  • Author

    Burkert, A. ; Paa, W. ; Neudeck, A. ; Muller, Dirk ; Heft, A. ; Schimanski, A.

  • Author_Institution
    Inst. of Photonic Technol., Jena, Germany
  • fYear
    2013
  • fDate
    9-14 June 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    SiO-LIF fields, and temperatures based on OH-LIF and OH* where used to optimize the burner to substrate distance and the thread temperature during SiOx layer deposition on glass and threads in an atmospheric HMDSO/propane/air flame.
  • Keywords
    combustion synthesis; flames; fluorescence; pulsed laser deposition; silicon compounds; thin films; SiO-LIF fields; SiO2; atmospheric HMDSO-propane-air flame; combustion based atmospheric layer deposition; laser diagnostics; substrate distance; thread temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2013 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6834115
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=689728