DocumentCode
689756
Title
Membrane-integrated superconducting nanowire singlephoton detectors
Author
Najafi, Faraz ; Mower, Jacob ; Hu, Xiaonan ; Bellei, Francesco ; Kharel, P. ; Dane, Andrew ; Ivry, Y. ; Cheong, Loong Fah ; Sunter, Kristen ; Englund, Dirk ; Berggren, Karl K.
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., Massachusetts Inst. of Technol., Cambridge, MA, USA
fYear
2013
fDate
9-14 June 2013
Firstpage
1
Lastpage
2
Abstract
We integrated superconducting nanowire single-photon detectors on sub-400-nm-thick silicon nitride membranes, which can then be transferred and aligned to photonic structures on a secondary chip with sub-micron placement accuracy.
Keywords
integrated optics; integrated optoelectronics; nanowires; silicon compounds; superconducting photodetectors; SiN; membrane-integrated superconducting nanowire single-photon detectors; photonic structures; secondary chip; silicon nitride membranes; size 400 nm; submicron placement accuracy; Detectors; Integrated circuits; Optical waveguides; Photonics; Silicon; Substrates; Timing jitter;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6834143
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