• DocumentCode
    689756
  • Title

    Membrane-integrated superconducting nanowire singlephoton detectors

  • Author

    Najafi, Faraz ; Mower, Jacob ; Hu, Xiaonan ; Bellei, Francesco ; Kharel, P. ; Dane, Andrew ; Ivry, Y. ; Cheong, Loong Fah ; Sunter, Kristen ; Englund, Dirk ; Berggren, Karl K.

  • Author_Institution
    Dept. of Electr. Eng. & Comput. Sci., Massachusetts Inst. of Technol., Cambridge, MA, USA
  • fYear
    2013
  • fDate
    9-14 June 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We integrated superconducting nanowire single-photon detectors on sub-400-nm-thick silicon nitride membranes, which can then be transferred and aligned to photonic structures on a secondary chip with sub-micron placement accuracy.
  • Keywords
    integrated optics; integrated optoelectronics; nanowires; silicon compounds; superconducting photodetectors; SiN; membrane-integrated superconducting nanowire single-photon detectors; photonic structures; secondary chip; silicon nitride membranes; size 400 nm; submicron placement accuracy; Detectors; Integrated circuits; Optical waveguides; Photonics; Silicon; Substrates; Timing jitter;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2013 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6834143