Title :
Patterning plasmonic nanostructures through resistless nanoimprinting in metal
Author :
Varghese Li Fan, Leo T. ; Yi Xuan ; Minghao Qi
Author_Institution :
Birck Nanotechnol. Center, Purdue Univ., Indiana, IN, USA
Abstract :
We report a low-cost method that allows silicon molds to directly imprint metals and achieve high-fidelity pattern transfer with vertical sidewalls and ultra-high resolution. Large-scale extraordinary light transmission through silver apertures is demonstrated.
Keywords :
light transmission; nanolithography; nanopatterning; nanophotonics; nanostructured materials; plasmonics; silicon; silver; soft lithography; Ag; large-scale extraordinary light transmission; pattern transfer; plasmonic nanostructure patterning; resistless nanoimprinting; silicon molds; silver apertures; ultrahigh resolution; vertical sidewalls; Fabrication; Films; Metals; Nanostructures; Plasmons; Scanning electron microscopy; Silicon;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
