• DocumentCode
    690963
  • Title

    Small Counter Bore Diameter Automatic Measurement System

  • Author

    Yao Zhang ; Xiaoya Liu

  • Author_Institution
    Comput. & Commun. Eng. Coll., Northeastern Univ. at Qinhuangdao, Qinhuangdao, China
  • fYear
    2013
  • fDate
    21-23 Sept. 2013
  • Firstpage
    6
  • Lastpage
    9
  • Abstract
    Deep hole diameter measurement questions are difficult at home and abroad, the current measurement method has the disadvantages of slow measuring speed and low precision. As the aperture decreasing, the measurement would be more difficult and the accuracy would be reduced. According to the above conditions, the noncontact measurement method based on the capacitance sensor is given out. The method can effectively improve the efficiency and accuracy of measurement. CCD combines with the 2-D micro-adjustment completes the function of precise positioning. Modular circuits make the signal integrity and accurate. LABVIEW software completes the function of controlling the system automatically, data acquisition and error correction. The experiments show that the scope of the whole system can be from Φ2.4mm to Φ7mm, the maximum resolution can be up to 0.5um, the highest precision can be up to 5um and linearity can be achieved 0.6018%. So the system can achieve nanometer measurement requirements.
  • Keywords
    capacitive sensors; charge-coupled devices; data acquisition; diameter measurement; error correction; microsensors; velocity measurement; virtual instrumentation; 2D microadjustment; LABVIEW software; capacitance sensor; data acquisition; deep hole diameter measurement; error correction; modular circuit; nanometer measurement requirement; noncontact measurement method; signal integrity; small counter bore diameter automatic measurement system; speed measurement; Apertures; Calibration; Capacitance; Capacitance measurement; Dielectric measurement; Electrodes; Measurement uncertainty; Capacitance sensor; Data acquisition; Error correction; Nano-metrology; Non-contact measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Instrumentation, Measurement, Computer, Communication and Control (IMCCC), 2013 Third International Conference on
  • Conference_Location
    Shenyang
  • Type

    conf

  • DOI
    10.1109/IMCCC.2013.9
  • Filename
    6840398