• DocumentCode
    690964
  • Title

    Ways to Improve Temperature Measurement Accuracy of InfraScope Thermal Mapper

  • Author

    Zhai Yuwei ; Liang Faguo ; Zheng Shiqi ; Wu Aihua ; Qiao Yue

  • Author_Institution
    Metrol. Center, Hebei Semicond. Res. Inst., Shijiazhuang, China
  • fYear
    2013
  • fDate
    21-23 Sept. 2013
  • Firstpage
    10
  • Lastpage
    13
  • Abstract
    In this paper we discuss the ways to improve the accuracy of InfraScope Thermal Mapper. We demonstrate the theory about space resolution and how it influences the temperature measurement using InfraScope Thermal Mapper. Then a way to enhance the accuracy by choosing the space resolution adequately is presented. Some experiments are designed and the results prove the way is effective. Then we study on the basic structures and work procedures of this instrument, combining with theory analysis we conclude an efficient emissivity measurement method. Following which we can measure emissivity at a single temperature. Then we analyze errors brought in by this method in emissivity calculation procedure, deliberately propose ways to improve on the measurement accuracy. At last, we verify the improvement by precise experiments.
  • Keywords
    emissivity; temperature measurement; emissivity calculation procedure; emissivity measurement method; infrascope thermal mapper; space resolution; temperature measurement; Accuracy; Aerospace electronics; Instruments; Metals; Photonics; Semiconductor device measurement; Temperature measurement; InfraScope Thermal Mapper; accuracy; emissivity; error; space resolution;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Instrumentation, Measurement, Computer, Communication and Control (IMCCC), 2013 Third International Conference on
  • Conference_Location
    Shenyang
  • Type

    conf

  • DOI
    10.1109/IMCCC.2013.10
  • Filename
    6840399