Calibration of the MgF2 Biplate Compensator Using a Straight-Through Ellipsometer

Author

Gaozeng Cui ; Tao Liu ; Guoguang Li ; Yaqin Chen ; Xia Guo

Author_Institution

Key Lab. of Microelectron. Devices & Integrated Technol., Beijing Univ. of Technol., Beijing, China

fYear

2013

fDate

21-23 Sept. 2013

Firstpage

731

Lastpage

735

Abstract

Zero order MgF₂ compensators are extensively used in deep ultra-violet(DUV) broadband optical instruments. This biplate compensator is made by two MgF₂ wave plates. For DUV broadband spectroscopic ellipsometers, the misalignment between the principal axes of the two MgF₂ wave plates must be carefully calibrated for the phase-retardance in order for this kind of compensator to be used in a high accuracy measurement. In this paper, we present a novel calibration method for such biplate compensator using a straight-through PC_RA (polarizer-rotating compensator-analyzer) ellipsometer. The theoretical formulae of the biplate compensator and the calibration method are derived by means of Jones matrix calculus. The experimental result for characterizing a commercial zero-order MgF₂ biplate compensator is presented. This method can be applied to multi-wave plate compensators, for example, achromatic and super achromatic compensators.

Keywords

ellipsometers; magnesium compounds; optical polarisers; DUV broadband spectroscopic ellipsometers; Jones matrix calculus; MgF₂; achromatic compensators; calibration method; deep ultraviolet broadband optical instruments; multiwaveplate compensators; phase-retardance; polarizer-rotating compensator-analyzer; principal axes; straight-through PC_RA ellipsometer; zero-order biplate compensator; Broadband communication; Calibration; Ellipsometry; Instruments; Microelectronics; Optical polarization; biplate compensator; misalignment angle; optical axis; spectroscopic ellipsometry; waveplates;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation, Measurement, Computer, Communication and Control (IMCCC), 2013 Third International Conference on

Conference_Location

Shenyang

Type

conf

DOI

10.1109/IMCCC.2013.162

Filename

6840552